The instrumentation available for IR-SSQ activities is distributed across three laboratories located at the Department of Physics (DIFI):
Laboratory 201 (for electrical, thermal, and magnetic measurements)
Laboratory 103 (for fabrication facilities)
LTD Laboratory (for measurements on sensors and devices)
Laboratory 201
- PPMS QUANTUM DESIGN - 9T
PPMS QUANTUM DESIGN - 14T
The system enables electrical property measurements across the entire range of temperature and magnetic field. It also includes a high-vacuum option, which allows for thermal measurements (such as specific heat, thermal conductivity, and the Seebeck effect). The system is equipped with a Vibrating Sample Magnetometer (VSM) featuring a large-bore coil set, enabling magnetic measurements on large samples, such as superconducting tapes and wires.
Laboratory 103
Facility for the fabrication of metallic thin films with high chemical and physical resistance (Ir, W, Re, Pt, Au, etc.), designed for coating applications and sensor development, including micrometer-scale patterning through UV optical lithography and reactive ion etching (RIE), along with metrological and surface analysis capabilities.
Ultra-high vacuum thin film deposition cluster
SUSS spinners (×3)
SUSS Mask Aligner K.
Oxford Plasma Technology ICP-RIE
MPI probe station
TPT HB10 wire bonder
Keyence VHX-7000 3D digital microscope
Sensofar NEOS 3D profilometer
LTD Laboratory
The LTD Laboratory is equipped with:
Three dilution refrigerators, with base temperatures ranging from 5 mK to 25 mK
SQUID systems (by Supracon, PTB, and VTT) for ultra-low-noise electrical measurements